http://smart-ir-heater.com/en/tags/precision/ Recent content in Precision on Smart Infrared Heating Systems Hugo en-us Fri, 03 Jul 2026 02:33:40 +0800 http://smart-ir-heater.com/en/posts/precision-ir-sensor-for-wafer/ Fri, 03 Jul 2026 02:33:40 +0800 http://smart-ir-heater.com/en/posts/precision-ir-sensor-for-wafer/ <p><img src="http://smart-ir-heater.com/images/0a976f8a438e1a813cc995e9355a4471.png" alt="Precision IR sensor for wafer"></p> <p>On the lithography floor, the bake isn’t a warm-up. It’s the process. A 2°C swing during soft bake will shift the photoresist Tg, and hard bake nonuniformity comes back to bite you as edge bead and linewidth excursion. You need temperature control you can count on, not something you cross your fingers over.</p> <h2 id="what-matters-technically">What matters, technically</h2> <p>We run a precision IR sensor on the wafer that keeps wafer-level thermal uniformity at ±0.1°C across the bake surface, and repeatability holds within ±0.05°C lot to lot. The sensor head is cleanroom-compatible for Class 1–100 and engineered to generate zero particles. The quartz/halogen emitter profile gives stable, repeatable NIR output—no hot spots. It covers photoresist bake profiles from 90°C to 250°C with tight thermal budget control, and the system is built for 24/7 <a href="https://o-yate.net">operation</a> <a href="https://goldisgood.com">without</a> unplanned downtime.</p>