Temperature sensor for wafer tool
Stop the Glass Rain: Keeping Your Wafers Clean When Lamps Fail In a semiconductor fab, a lamp blowing out is more than just a nuisance. It’s a...
MEMS sensor wafer drying heater
When you’re drying MEMS sensor wafers after a chemical clean, you’re walking a pretty thin line. You need intense heat to get the job...
Smart sensor packaging infrared
Getting Your Thermal Data Right in the Smart Fab If you’re planning an Industry 4.0 fab, you’ve probably realized that the old way of...
Hydrogen sensor fabrication heater
Stop Wasting Heat in Your Hydrogen Sensor Fab When you’re making hydrogen sensors, the heat profile on your wafer has to be spot on. No...
Precision IR sensor for wafer
On the lithography floor, the bake isn’t a warm-up. It’s the process. A 2°C swing during soft bake will shift the photoresist Tg, and hard bake...